Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces
Patterning micro- and nano-scale optical elements on nonplanar substrates has been technically challenging and prohibitively expensive via conventional processes. A low-cost, high-precision fabrication process is thus highly desired and can have significant impact on manufacturing that leads to wide...
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| Veröffentlicht in: | Optics express 2015-08, Vol.23 (16), p.20977-20985 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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