Cu-Oxide-Assisted Selective Pyrolysis of Organic Nanolayer on Patterned SiO2–Cu Surface

Organic nanolayers attract much attention for the isolation and adhesion promotion of the Cu line and insulator in Cu interconnection of microelectronic devices. This paper proposes a strategy for selective formation of adhesion nanolayer on the insulator surface with etching it on Cu surface by Cu-...

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Veröffentlicht in:	ACS applied materials & interfaces 2015-08, Vol.7 (31), p.17131-17137
Hauptverfasser:	Kayaba, Yasuhisa, Ono, Shoko Sugiyama, Suzuki, Tsuneji, Tanaka, Hirofumi, Kohmura, Kazuo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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