Patterning gold nanoparticles in liquid environment with high ionic strength for local fabrication of up to 100 μm long metallic interconnections

Metallic interconnections were fabricated in situ using the FluidFM as scanning probe lithography tool. In contrast to other SPL tools, the closed fluidic circuit of the FluidFM enables a pressure-controlled deposition of metallic nanoparticles in liquid environment. Taking advantage of the salt con...

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Veröffentlicht in:	Nanotechnology 2015-05, Vol.26 (17), p.175301-175301
Hauptverfasser:	Grüter, Robert R, Dielacher, Bernd, Hirt, Luca, Vörös, János, Zambelli, Tomaso
Format:	Artikel
Sprache:	eng
Schlagworte:	Deposition Gold Interconnections Liquids Nanoparticles Patterning Strength
Online-Zugang:	Volltext
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