Shear-force microscopy investigation of roughness and shape of micro-fabricated holes

•Specifically conceived SPM overcoming some limitations of conventional AFMs.•Analysis of surface roughness, with nanosized accuracy, of complex shape samples.•High resolution topography maps across the edge of a nozzles drilled by different techniques.•High grade comparison of nozzles drilled by di...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Precision engineering 2015-07, Vol.41, p.32-39
Hauptverfasser:	Tantussi, Francesco, Vella, Daniele, Allegrini, Maria, Fuso, Francesco, Romoli, Luca, Rashed, Choudhury Abul Anam
Format:	Artikel
Sprache:	eng
Schlagworte:	Diagnostic systems Drilling Finishing Fuel injection Laser machining Machining Micro-machining Nozzles Reconstruction Roughness Scanning probe microscopy
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