Composition and emission characterization and computational simulation of silicon rich oxide films obtained by LPCVD

Silicon rich oxide (SRO) is a silicon compatible material that could solve the light emission limitation inherent to bulk silicon. However, not many applications are yet reported, since still much research has to be done. In this paper, SRO superficial films were obtained by low pressure chemical va...

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Veröffentlicht in:	Surface and interface analysis 2014-04, Vol.46 (4), p.216-223
Hauptverfasser:	Aceves-Mijares, M., Espinosa-Torres, N. D., Flores-Gracia, F., González-Fernández, A. A., López-Estopier, R., Román-López, S., Pedraza, G., Domínguez, C., Morales, A., Falcony, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Computer simulation DFT electro and cathode luminescence Emission Fourier transforms Infrared spectroscopy Mathematical analysis moieties photo Short range order Silicon SRO films
Online-Zugang:	Volltext
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