Room temperature preparation of high performance AZO films by MF sputtering

Aluminum-doped zinc oxide (AZO) thin films have been deposited by MF magnetron sputtering from a ceramic oxide target without heating the substrates. This study has investigated effects of sputtering power on the structural, electrical and optical properties of the AZO films. The films delivered a h...

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Veröffentlicht in:	Ceramics international 2013-03, Vol.39 (2), p.1135-1141
Hauptverfasser:	Shi, Qian, Zhou, Kesong, Dai, Minjiang, Hou, Huijun, Lin, Songsheng, Wei, Chunbei, Hu, Fang
Format:	Artikel
Sprache:	eng
Schlagworte:	Al-doped zinc oxide Azo Ceramics Deposition Electric power generation Electrical properties Grain size Magnetron sputtering MF Sputtering Oxides Sputtering Transmittance
Online-Zugang:	Volltext
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