Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

This Technical Report revises ISO/TR 19319:2003 —Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser. The revised Technical Report gives a short introduction to basic mode...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Surface and interface analysis 2013-09, Vol.45 (9), p.1313-1316
Hauptverfasser:	Senoner, M., Unger, W. E. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical analysis Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology CTF ESF Exact sciences and technology Imaging Interface analysis lateral resolution LSF Mathematical models MTF narrow stripe noise Physical factors Physics PSF resolution criterion Sharpness square-wave grating straight edge
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!