Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
This Technical Report revises ISO/TR 19319:2003 —Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser. The revised Technical Report gives a short introduction to basic mode...
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| Veröffentlicht in: | Surface and interface analysis 2013-09, Vol.45 (9), p.1313-1316 |
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| container_end_page | 1316 |
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| container_title | Surface and interface analysis |
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| creator | Senoner, M. Unger, W. E. S. |
| description | This Technical Report revises ISO/TR 19319:2003 —Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser. The revised Technical Report gives a short introduction to basic models of image formation and introduces functions which characterize the performance of imaging instruments with respect to lateral resolution and sharpness. The determination of lateral resolution by imaging of square‐wave gratings and the determination of sharpness by imaging of narrow stripes and straight edges are described in detail. Finally, physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser are discussed. Copyright © 2013 John Wiley & Sons, Ltd. |
| doi_str_mv | 10.1002/sia.5294 |
| format | Article |
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E. S.</creatorcontrib><title>Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods</title><title>Surface and interface analysis</title><addtitle>Surf. Interface Anal</addtitle><description>This Technical Report revises ISO/TR 19319:2003 —Surface chemical analysis—Auger electron spectroscopy and X‐ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser. The revised Technical Report gives a short introduction to basic models of image formation and introduces functions which characterize the performance of imaging instruments with respect to lateral resolution and sharpness. The determination of lateral resolution by imaging of square‐wave gratings and the determination of sharpness by imaging of narrow stripes and straight edges are described in detail. Finally, physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser are discussed. 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| fulltext | fulltext |
| identifier | ISSN: 0142-2421 |
| ispartof | Surface and interface analysis, 2013-09, Vol.45 (9), p.1313-1316 |
| issn | 0142-2421 1096-9918 |
| language | eng |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Chemical analysis Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology CTF ESF Exact sciences and technology Imaging Interface analysis lateral resolution LSF Mathematical models MTF narrow stripe noise Physical factors Physics PSF resolution criterion Sharpness square-wave grating straight edge |
| title | Summary of ISO/TC 201 Technical Report: ISO/TR 19319:2013 - Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods |
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