Self-measuring Method and Experiment of Residual Stress of Grating Moving Light Modulator

Most of the measuring methods of residual stress of devices of micro-electro-mechanical systems(MEMS) need standard test structures. The structures will take up a lot of space on the chip, and enhance the complication and difficulty of measuring. Aiming at a grating moving light modulator (GMLM) bas...

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Veröffentlicht in:	Ji xie gong cheng xue bao 2010-04, Vol.46 (8), p.12-17
Hauptverfasser:	Zhang, Zhihai, Huang, Shanglian, Zhang, Jie, Jin, Zhu, Wang, Ning
Format:	Artikel
Sprache:	chi
Schlagworte:	Actuators Aluminum Electric potential Light modulators Mathematical analysis Residual stress Voltage
Online-Zugang:	Volltext
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