Effect of Post Deposition Annealing Process on the pH Sensitivity of Spin-Coated Titanium Dioxide Thin Film

This paper presents an investigation on titanium dioxide (TiO2) thin film, which is used as sensing membrane for Extended-Gate Field Effect Transistor (EGFET) for pH sensing application. TiO2 thin films were deposited using sol-gel spin coating method on indium tin oxide (ITO) substrates. After the...

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Veröffentlicht in:	Applied Mechanics and Materials 2015-04, Vol.749 (Materials and Manufacturing Engineering), p.197-201
Hauptverfasser:	Hanim Abdullah, Wan Fazlida, Rahman, Rohanieza Abdul, Zulkefle, Muhammad Al Hadi, Herman, Sukreen Hana
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Detection Indium tin oxide Membranes Thin films Titanium dioxide Volt-ampere characteristics
Online-Zugang:	Volltext
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