Position Analysis of a Hybrid Serial-Parallel Manipulator in Immersion Lithography

This paper proposes a novel hybrid serial-parallel mechanism with 6 degrees of freedom. The new mechanism combines two different parallel modules in a serial form. 3-P̲(PH) parallel module is architecture of 3 degrees of freedom based on higher joints and specializes in describing two planes’ relati...

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Veröffentlicht in:	Mathematical problems in engineering 2015-01, Vol.2015 (2015), p.1-14
Hauptverfasser:	Fu, Xin, Chen, Wen-yu, Ma, Tong, Shao, Jie-jie
Format:	Artikel
Sprache:	eng
Schlagworte:	Architecture Degrees of freedom Engineering Hoods Hybrid systems Immersion Inverse Kinematics Lithography Mathematical analysis Modules Offset printing Parallel degrees of freedom Position measurement Real time Studies Submerging Wafers
Online-Zugang:	Volltext
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