Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance

It has been demonstrated that the piezoresistive effect in silicon can be useful for boosting electromechanical transduction in Micro Electro Mechanical Systems (MEMS) resonators. Piezoresistive sensing has been applied to a number of different extensional mode resonator topologies. In comparison, f...

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Veröffentlicht in:	IEEE transactions on electron devices 2015-05, Vol.62 (5), p.1596-1602
Hauptverfasser:	Weiguan Zhang, Haoshen Zhu, Lee, Joshua E.-Y
Format:	Artikel
Sprache:	eng
Schlagworte:	Beams (structural) Characterization Detection Devices Doping Iron Mechanical systems MEMS Micromechanical devices Piezoresistance piezoresistive devices R&D Research & development Resonant frequencies Resonators Sensors Shape Strain Tuning
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