The influence of titanium doping on the electric properties of amorphous alumina films prepared by sol–gel technology

The influence of titanium doping on the electric properties of amorphous alumina (Al 2 O 3 ) films prepared by sol–gel technology was investigated. EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the ti...

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Veröffentlicht in:Journal of sol-gel science and technology 2015-04, Vol.74 (1), p.39-44
Hauptverfasser: Yao, Manwen, Xiao, Ruihua, Peng, Yong, Chen, Jianwen, Hu, Baofu, Yao, Xi
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Sprache:eng
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