The influence of titanium doping on the electric properties of amorphous alumina films prepared by sol–gel technology

The influence of titanium doping on the electric properties of amorphous alumina (Al 2 O 3 ) films prepared by sol–gel technology was investigated. EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the ti...

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Veröffentlicht in:Journal of sol-gel science and technology 2015-04, Vol.74 (1), p.39-44
Hauptverfasser: Yao, Manwen, Xiao, Ruihua, Peng, Yong, Chen, Jianwen, Hu, Baofu, Yao, Xi
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Xiao, Ruihua
Peng, Yong
Chen, Jianwen
Hu, Baofu
Yao, Xi
description The influence of titanium doping on the electric properties of amorphous alumina (Al 2 O 3 ) films prepared by sol–gel technology was investigated. EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the titanium exists in the form of TiO 2 . The breakdown strength of the doped film can be much enhanced by the titanium doping. The dielectric strength of undoped Al 2 O 3 films is 3.4 MV/cm, while the breakdown strength of the 10 % Ti-doped Al 2 O 3 films is 5.3 MV/cm. Compared with the undoped Al 2 O 3 films, the soft breakdown of Ti-doped Al 2 O 3 films is gradually suppressed with the increasing of the titanium doping amount. Especially, there is hardly any soft breakdown observed for 10 % Ti-doped Al 2 O 3 films.
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EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the titanium exists in the form of TiO 2 . The breakdown strength of the doped film can be much enhanced by the titanium doping. The dielectric strength of undoped Al 2 O 3 films is 3.4 MV/cm, while the breakdown strength of the 10 % Ti-doped Al 2 O 3 films is 5.3 MV/cm. Compared with the undoped Al 2 O 3 films, the soft breakdown of Ti-doped Al 2 O 3 films is gradually suppressed with the increasing of the titanium doping amount. Especially, there is hardly any soft breakdown observed for 10 % Ti-doped Al 2 O 3 films.</description><identifier>ISSN: 0928-0707</identifier><identifier>EISSN: 1573-4846</identifier><identifier>DOI: 10.1007/s10971-014-3568-1</identifier><language>eng</language><publisher>Boston: Springer US</publisher><subject>Aluminum oxide ; Breakdown ; Ceramics ; Chemistry and Materials Science ; Composites ; Dielectric strength ; Doped films ; Doping ; Electric properties ; Glass ; Inorganic Chemistry ; Mapping ; Materials Science ; Nanotechnology ; Natural Materials ; Optical and Electronic Materials ; Original Paper ; Sol gel process ; Sol-gel processes ; Titanium ; Titanium dioxide ; X ray photoelectron spectroscopy</subject><ispartof>Journal of sol-gel science and technology, 2015-04, Vol.74 (1), p.39-44</ispartof><rights>Springer Science+Business Media New York 2014</rights><rights>Journal of Sol-Gel Science and Technology is a copyright of Springer, (2014). 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EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the titanium exists in the form of TiO 2 . The breakdown strength of the doped film can be much enhanced by the titanium doping. The dielectric strength of undoped Al 2 O 3 films is 3.4 MV/cm, while the breakdown strength of the 10 % Ti-doped Al 2 O 3 films is 5.3 MV/cm. Compared with the undoped Al 2 O 3 films, the soft breakdown of Ti-doped Al 2 O 3 films is gradually suppressed with the increasing of the titanium doping amount. 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EDX mapping analysis indicates that the titanium cations are uniformly distributed in the film as Al 2−x Ti x O y . The XPS analysis reveals that the titanium exists in the form of TiO 2 . The breakdown strength of the doped film can be much enhanced by the titanium doping. The dielectric strength of undoped Al 2 O 3 films is 3.4 MV/cm, while the breakdown strength of the 10 % Ti-doped Al 2 O 3 films is 5.3 MV/cm. Compared with the undoped Al 2 O 3 films, the soft breakdown of Ti-doped Al 2 O 3 films is gradually suppressed with the increasing of the titanium doping amount. Especially, there is hardly any soft breakdown observed for 10 % Ti-doped Al 2 O 3 films.</abstract><cop>Boston</cop><pub>Springer US</pub><doi>10.1007/s10971-014-3568-1</doi><tpages>6</tpages></addata></record>
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subjects Aluminum oxide
Breakdown
Ceramics
Chemistry and Materials Science
Composites
Dielectric strength
Doped films
Doping
Electric properties
Glass
Inorganic Chemistry
Mapping
Materials Science
Nanotechnology
Natural Materials
Optical and Electronic Materials
Original Paper
Sol gel process
Sol-gel processes
Titanium
Titanium dioxide
X ray photoelectron spectroscopy
title The influence of titanium doping on the electric properties of amorphous alumina films prepared by sol–gel technology
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