Size-reduced two-dimensional integrated magnetic sensor fabricated in 0.18-μm CMOS process

Two‐dimensional integrated magnetic sensors have been investigated in order to reduce their size for use in a magnetic self‐levitation motor. The two‐dimensional integrated magnetic sensor investigated in this paper is composed of a 16 × 16 array of Hall sensors and fabricated by a 0.18‐μm complemen...

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Veröffentlicht in:IEEJ transactions on electrical and electronic engineering 2015-05, Vol.10 (3), p.345-349
Hauptverfasser: Kimura, Takayuki, Uno, Kazuya, Masuzawa, Toru
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Sprache:eng
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