Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy

In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D s...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2014, Vol.53 (9), p.96202-1-096202-6
Hauptverfasser:	Shinohara, Masanori, Taniguchi, Yujiro, Takaki, Yuya, Matsuda, Yoshinobu, Fujiyama, Hiroshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Adsorption Benzene Bias Deuteration Hydrocarbons Infrared absorption Ring structures Spectroscopy Surface chemistry
Online-Zugang:	Volltext
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