Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy
In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D s...
Gespeichert in:
| Veröffentlicht in: | Japanese Journal of Applied Physics 2014, Vol.53 (9), p.96202-1-096202-6 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1-096202-6 |
|---|---|
| container_issue | 9 |
| container_start_page | 96202 |
| container_title | Japanese Journal of Applied Physics |
| container_volume | 53 |
| creator | Shinohara, Masanori Taniguchi, Yujiro Takaki, Yuya Matsuda, Yoshinobu Fujiyama, Hiroshi |
| description | In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D stretching vibration of the deuterated phenyl group, which indicated a mode in which the benzene ring structure is retained on the substrate during the adsorption. The evolution of each peak during the plasma exposure suggests that the addition reaction occurs during the adsorption. Furthermore, we observed that with increasing substrate bias applied, the benzene ring structures in the film were disrupted and the amount of alkane components increased. This addition reaction proceeded on the film surface, regardless of the substrate bias. |
| doi_str_mv | 10.7567/JJAP.53.096202 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_iop_j</sourceid><recordid>TN_cdi_proquest_miscellaneous_1685782009</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1685782009</sourcerecordid><originalsourceid>FETCH-LOGICAL-c443t-a73281115c2d4fb7a0a1809c9fc8701c4a8cc250269916aa471ca9a2ee390f723</originalsourceid><addsrcrecordid>eNp1kD1PwzAQhi0EEqWwMmeskBJsx4njsar4qirBALN1dRxIlcTGdobyD_jXOGrFBNPpvXvu60XomuCMFyW_Xa-XL1mRZ1iUFNMTNCM54ynDZXGKZhhTkjJB6Tm68H4XZVkwMkPfy9obZ0NrhsQ0yce-dkaB20apTG_NoIfgk3c9aAdB10k7JLUew1Ft9fAVS4ntwPeQ-DDW7ZTeT5xvw5g4DV0a2l7HTOPAxSpsfzd6q1Vwxitj95forIHO66tjnKO3-7vX1WO6eX54Wi03qWIsDynwnFaEkELRmjVbDhhIhYUSjao4JopBpRQt4n9CkBKAcaJAANU6F7jhNJ-jxWGudeZz1D7IvvVKdx0M2oxekrIqeEUxFhHNDqiKN3qnG2ld24PbS4Ll5LmcPJdFLg-ex4abQ0NrrNyZ0Q3xk__hxR_wbgd2gsQRk7Zu8h97upJ6</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1685782009</pqid></control><display><type>article</type><title>Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Shinohara, Masanori ; Taniguchi, Yujiro ; Takaki, Yuya ; Matsuda, Yoshinobu ; Fujiyama, Hiroshi</creator><creatorcontrib>Shinohara, Masanori ; Taniguchi, Yujiro ; Takaki, Yuya ; Matsuda, Yoshinobu ; Fujiyama, Hiroshi</creatorcontrib><description>In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D stretching vibration of the deuterated phenyl group, which indicated a mode in which the benzene ring structure is retained on the substrate during the adsorption. The evolution of each peak during the plasma exposure suggests that the addition reaction occurs during the adsorption. Furthermore, we observed that with increasing substrate bias applied, the benzene ring structures in the film were disrupted and the amount of alkane components increased. This addition reaction proceeded on the film surface, regardless of the substrate bias.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.7567/JJAP.53.096202</identifier><identifier>CODEN: JJAPB6</identifier><language>eng</language><publisher>The Japan Society of Applied Physics</publisher><subject>Adsorption ; Benzene ; Bias ; Deuteration ; Hydrocarbons ; Infrared absorption ; Ring structures ; Spectroscopy ; Surface chemistry</subject><ispartof>Japanese Journal of Applied Physics, 2014, Vol.53 (9), p.96202-1-096202-6</ispartof><rights>2014 The Japan Society of Applied Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c443t-a73281115c2d4fb7a0a1809c9fc8701c4a8cc250269916aa471ca9a2ee390f723</citedby><cites>FETCH-LOGICAL-c443t-a73281115c2d4fb7a0a1809c9fc8701c4a8cc250269916aa471ca9a2ee390f723</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.7567/JJAP.53.096202/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,4024,27923,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Shinohara, Masanori</creatorcontrib><creatorcontrib>Taniguchi, Yujiro</creatorcontrib><creatorcontrib>Takaki, Yuya</creatorcontrib><creatorcontrib>Matsuda, Yoshinobu</creatorcontrib><creatorcontrib>Fujiyama, Hiroshi</creatorcontrib><title>Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy</title><title>Japanese Journal of Applied Physics</title><addtitle>Jpn. J. Appl. Phys</addtitle><description>In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D stretching vibration of the deuterated phenyl group, which indicated a mode in which the benzene ring structure is retained on the substrate during the adsorption. The evolution of each peak during the plasma exposure suggests that the addition reaction occurs during the adsorption. Furthermore, we observed that with increasing substrate bias applied, the benzene ring structures in the film were disrupted and the amount of alkane components increased. This addition reaction proceeded on the film surface, regardless of the substrate bias.</description><subject>Adsorption</subject><subject>Benzene</subject><subject>Bias</subject><subject>Deuteration</subject><subject>Hydrocarbons</subject><subject>Infrared absorption</subject><subject>Ring structures</subject><subject>Spectroscopy</subject><subject>Surface chemistry</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNp1kD1PwzAQhi0EEqWwMmeskBJsx4njsar4qirBALN1dRxIlcTGdobyD_jXOGrFBNPpvXvu60XomuCMFyW_Xa-XL1mRZ1iUFNMTNCM54ynDZXGKZhhTkjJB6Tm68H4XZVkwMkPfy9obZ0NrhsQ0yce-dkaB20apTG_NoIfgk3c9aAdB10k7JLUew1Ft9fAVS4ntwPeQ-DDW7ZTeT5xvw5g4DV0a2l7HTOPAxSpsfzd6q1Vwxitj95forIHO66tjnKO3-7vX1WO6eX54Wi03qWIsDynwnFaEkELRmjVbDhhIhYUSjao4JopBpRQt4n9CkBKAcaJAANU6F7jhNJ-jxWGudeZz1D7IvvVKdx0M2oxekrIqeEUxFhHNDqiKN3qnG2ld24PbS4Ll5LmcPJdFLg-ex4abQ0NrrNyZ0Q3xk__hxR_wbgd2gsQRk7Zu8h97upJ6</recordid><startdate>2014</startdate><enddate>2014</enddate><creator>Shinohara, Masanori</creator><creator>Taniguchi, Yujiro</creator><creator>Takaki, Yuya</creator><creator>Matsuda, Yoshinobu</creator><creator>Fujiyama, Hiroshi</creator><general>The Japan Society of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>2014</creationdate><title>Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy</title><author>Shinohara, Masanori ; Taniguchi, Yujiro ; Takaki, Yuya ; Matsuda, Yoshinobu ; Fujiyama, Hiroshi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c443t-a73281115c2d4fb7a0a1809c9fc8701c4a8cc250269916aa471ca9a2ee390f723</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Adsorption</topic><topic>Benzene</topic><topic>Bias</topic><topic>Deuteration</topic><topic>Hydrocarbons</topic><topic>Infrared absorption</topic><topic>Ring structures</topic><topic>Spectroscopy</topic><topic>Surface chemistry</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Shinohara, Masanori</creatorcontrib><creatorcontrib>Taniguchi, Yujiro</creatorcontrib><creatorcontrib>Takaki, Yuya</creatorcontrib><creatorcontrib>Matsuda, Yoshinobu</creatorcontrib><creatorcontrib>Fujiyama, Hiroshi</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Shinohara, Masanori</au><au>Taniguchi, Yujiro</au><au>Takaki, Yuya</au><au>Matsuda, Yoshinobu</au><au>Fujiyama, Hiroshi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><addtitle>Jpn. J. Appl. Phys</addtitle><date>2014</date><risdate>2014</risdate><volume>53</volume><issue>9</issue><spage>96202</spage><epage>1-096202-6</epage><pages>96202-1-096202-6</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPB6</coden><abstract>In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C-D stretching vibration of the deuterated phenyl group, which indicated a mode in which the benzene ring structure is retained on the substrate during the adsorption. The evolution of each peak during the plasma exposure suggests that the addition reaction occurs during the adsorption. Furthermore, we observed that with increasing substrate bias applied, the benzene ring structures in the film were disrupted and the amount of alkane components increased. This addition reaction proceeded on the film surface, regardless of the substrate bias.</abstract><pub>The Japan Society of Applied Physics</pub><doi>10.7567/JJAP.53.096202</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0021-4922 |
| ispartof | Japanese Journal of Applied Physics, 2014, Vol.53 (9), p.96202-1-096202-6 |
| issn | 0021-4922 1347-4065 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1685782009 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Adsorption Benzene Bias Deuteration Hydrocarbons Infrared absorption Ring structures Spectroscopy Surface chemistry |
| title | Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T13%3A11%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_iop_j&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Adsorption%20of%20hydrocarbon%20components%20generated%20in%20deuterated%20benzene%20plasma%20studied%20by%20in%20situ%20real-time%20infrared%20absorption%20spectroscopy&rft.jtitle=Japanese%20Journal%20of%20Applied%20Physics&rft.au=Shinohara,%20Masanori&rft.date=2014&rft.volume=53&rft.issue=9&rft.spage=96202&rft.epage=1-096202-6&rft.pages=96202-1-096202-6&rft.issn=0021-4922&rft.eissn=1347-4065&rft.coden=JJAPB6&rft_id=info:doi/10.7567/JJAP.53.096202&rft_dat=%3Cproquest_iop_j%3E1685782009%3C/proquest_iop_j%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1685782009&rft_id=info:pmid/&rfr_iscdi=true |