Design and Fabrication of a Novel MEMS Capacitive Transducer With Multiple Moving Membrane, rm M 3 -CMUT

A novel capacitive micromachined ultrasonic transducer is designed and fabricated. This transducer employs a stack of two deflectable membranes suspended over a fixed bottom electrode. In this configuration, the two moving membranes deflect simultaneously in response to a bias voltage, which results...

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Veröffentlicht in:	IEEE transactions on electron devices 2014-03, Vol.61 (3), p.890-896
Hauptverfasser:	Emadi, Tahereh Arezoo, Buchanan, Douglas A
Format:	Artikel
Sprache:	eng
Schlagworte:	Deflection Devices Electrical measurement Electrodes Holes Membranes Microelectromechanical systems Transducers
Online-Zugang:	Volltext
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