A New MEMS Stochastic Model Order Reduction Method: Research and Application

Modeling and simulation of MEMS devices is a very complex tasks which involve the electrical, mechanical, fluidic, and thermal domains, and there are still some uncertainties that need to be accounted for during the robust design of MEMS actuators caused by uncertain material and/or geometric parame...

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Veröffentlicht in:	Journal of sensors 2015-01, Vol.2015 (2015), p.1-10
Hauptverfasser:	Yunpeng, Lv, Chen, Guojin, Gong, Youping, Xiangjuan, Bian
Format:	Artikel
Sprache:	eng
Schlagworte:	Algorithms Computer simulation Design engineering Devices Finite element method Mathematical analysis Mathematical models Monte Carlo simulation Order reduction Polynomials Random variables Standard deviation Stochastic models Stochasticity
Online-Zugang:	Volltext
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