Greyscale proton beam writing in p-type Gallium Arsenide

Proton beam writing (PBW) is a well known method for micromachining, e.g. of semiconductors. Up to now, only few indication is given on how the resulting structure height in micromachined semiconductors can be controlled by means of fluence variation. This approach for 3D-microstructuring, called Gr...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2013-07, Vol.306, p.275-280
Hauptverfasser:	Diering, D., Spemann, D., Lenzner, J., Müller, St, Böntgen, T., von Wenckstern, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic structure Etching Fluence Gallium arsenide Gallium arsenides Greyscale lithography Micromachining p-Type GaAs PBW Proton beams Semiconductors
Online-Zugang:	Volltext
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