Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy
Accurate and reliable measurements of gas composition are very important in science and industry applications. One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work, we propose integrated microcell for optical measurements of gas discharge at atmospheric pressur...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2015-03, Vol.223, p.174-179 |
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| container_title | Sensors and actuators. A. Physical. |
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| creator | Macioszczyk, Jan Malecha, Karol Roguszczak, Henryk Patela, Sergiusz Golonka, Leszek J. |
| description | Accurate and reliable measurements of gas composition are very important in science and industry applications. One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work, we propose integrated microcell for optical measurements of gas discharge at atmospheric pressure. This device is fabricated using Low Temperature Co-fired Ceramics (LTCC) technology. Investigated gas is excited in buried air-cavity, placed between two electrodes. Discharge is created using high alternating voltage (30kV). Optical signal is then transmitted through an integrated optical fibre to the miniature spectrometer. Because different gases have different emission lines, plot of light intensity vs. wavelength provides information about molecular composition of the investigated gas sample. In this work, design, fabrication and performance of the LTCC-based gas discharge chamber is presented. Spectral measurements are performed for air, argon and nitrogen. Moreover, influence of gas flow rate on obtained emission spectrum is discussed. |
| doi_str_mv | 10.1016/j.sna.2015.01.011 |
| format | Article |
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One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work, we propose integrated microcell for optical measurements of gas discharge at atmospheric pressure. This device is fabricated using Low Temperature Co-fired Ceramics (LTCC) technology. Investigated gas is excited in buried air-cavity, placed between two electrodes. Discharge is created using high alternating voltage (30kV). Optical signal is then transmitted through an integrated optical fibre to the miniature spectrometer. Because different gases have different emission lines, plot of light intensity vs. wavelength provides information about molecular composition of the investigated gas sample. In this work, design, fabrication and performance of the LTCC-based gas discharge chamber is presented. Spectral measurements are performed for air, argon and nitrogen. 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A. Physical.</title><description>Accurate and reliable measurements of gas composition are very important in science and industry applications. One way to accomplish this task is to measure spectrum of plasma gas discharge. In our work, we propose integrated microcell for optical measurements of gas discharge at atmospheric pressure. This device is fabricated using Low Temperature Co-fired Ceramics (LTCC) technology. Investigated gas is excited in buried air-cavity, placed between two electrodes. Discharge is created using high alternating voltage (30kV). Optical signal is then transmitted through an integrated optical fibre to the miniature spectrometer. Because different gases have different emission lines, plot of light intensity vs. wavelength provides information about molecular composition of the investigated gas sample. In this work, design, fabrication and performance of the LTCC-based gas discharge chamber is presented. 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| ispartof | Sensors and actuators. A. Physical., 2015-03, Vol.223, p.174-179 |
| issn | 0924-4247 1873-3069 |
| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Atmospheric pressure Atmospheric pressure plasma Barometric pressure Ceramics Devices Electrodes Emission Gas composition Gas discharges Gas sensor Gas spectroscopy LTCC Spectrometers |
| title | Low temperature co-fired ceramics plasma generator for atmospheric pressure gas spectroscopy |
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