Multiple nanoscale parallel grooves formed on Si3N4/TiC ceramic by femtosecond pulsed laser

•Femtosecond pulsed laser nanotexturing of Si3N4/TiC ceramic was investigated.•The optimum processing parameters for the formation of ripples were identified.•Surface morphology, ablation dimension and surface roughness were measured.•Formation mechanism of ripples on Si3N4/TiC ceramic surface was d...

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Veröffentlicht in:	Applied surface science 2014-01, Vol.289, p.62-71
Hauptverfasser:	Xing, Youqiang, Deng, Jianxin, Lian, Yunsong, Zhang, Kedong, Zhang, Guodong, Zhao, Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Ceramics Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Constants Cross-disciplinary physics: materials science rheology Exact sciences and technology Femtosecond pulsed laser Grooves Nanostructure Physics Ripples Scanning Scanning electron microscopy Si3N4/TiC ceramic Silicon nitride Titanium carbide Wavelengths
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