An atomistic investigation on the mechanism of machining nanostructures when using single tip and multi-tip diamond tools

In our previous work, a scale-up fabrication approach to cost effectively manufacturing nano-gratings over large area has been developed through diamond turning by using a multi-tip diamond tool fabricated by Focused Ion Beam. The objective of this study is to gain an in-depth understanding of the m...

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Veröffentlicht in:Applied surface science 2014-01, Vol.290, p.458-465
Hauptverfasser: Tong, Zhen, Liang, Yingchun, Jiang, Xiangqian, Luo, Xichun
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Sprache:eng
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