Langasite crystal microbalance frequency behavior over wide gas phase conditions for chemical vapor deposition

The frequency behavior of the langasite crystal microbalance (LCM) was studied, by measuring density and viscosity of gas mixtures consisting of inactive and reactive gases, such as nitrogen, hydrogen, trichlorosilane and monomethylsilane at atmospheric pressure in the temperature range from 160 to...

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Veröffentlicht in:	Surface & coatings technology 2013-09, Vol.230, p.312-315
Hauptverfasser:	Habuka, Hitoshi, Matsui, Misako
Format:	Artikel
Sprache:	eng
Schlagworte:	Accounting Chemical vapor deposition Cross-disciplinary physics: materials science rheology Crystals Density Exact sciences and technology Frequency behavior Gas mixtures Gas phases Langasite crystal microbalance Materials science Mathematical analysis Microbalances Optimization Physics Surface treatments
Online-Zugang:	Volltext
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