Enhanced Work Function of Al-Doped Zinc-Oxide Thin Films by Oxygen Inductively Coupled Plasma Treatment

Al-doped zinc-oxide (AZO) thin films treated by oxygen and chlorine inductively coupled plasma (ICP) were compared. Kelvin probe (KP) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the effect of treatment. The results of KP measurement show that the surface work function of...

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Veröffentlicht in:	Plasma science & technology 2014-01, Vol.16 (1), p.79-82
Hauptverfasser:	Li, Zebin, Wu, Zhonghang, Ju, Jiaqi, He, Kongduo, Chen, Zhenliu, Yang, Xilu, Yan, Hang, Ou, Qiongrong, Liang, Rongqing
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Azo Chlorine Inductively coupled plasma Photoelectron spectroscopy Thin films Work functions X-ray photoelectron spectroscopy X-rays
Online-Zugang:	Volltext
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