Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation

Indium tin oxide （ITO） transparent conducting film was treated with oxygen plasma immersion ion implantation （PIII）. X-ray photoelectron spectroscopy （XPS） was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than...

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Veröffentlicht in:	Plasma science & technology 2013-08, Vol.15 (8), p.791-793
1. Verfasser:	高欢忠何龙何志江李泽斌吴忠航成卫海艾畦范晓轩区琼荣梁荣庆
Format:	Artikel
Sprache:	eng
Schlagworte:	Conduction Immersion Indium tin oxide Ion implantation Oxygen content Oxygen plasma Work functions X-ray photoelectron spectroscopy X-rays X射线光电子能谱功能增强氧化铟锡等离子体处理等离子体浸没离子注入过氧透明导电膜铟锡氧化物
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Zusammenfassung:	Indium tin oxide （ITO） transparent conducting film was treated with oxygen plasma immersion ion implantation （PIII）. X-ray photoelectron spectroscopy （XPS） was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV.
ISSN:	1009-0630
DOI:	10.1088/1009-0630/15/8/14