Gas Breakdown of Radio Frequency Glow Discharges in Helium at near Atmospheric Pressure
A one-dimensional self-consistent fluid model was developed for radio frequency glow discharge in helium at near atmospheric pressure, and was employed to study the gas breakdown characteristics in terms of breakdown voltage. The effective secondary electron emission coefficient and the effective el...
Gespeichert in:
Veröffentlicht in: | Plasma science & technology 2013-07, Vol.15 (7), p.623-626 |
---|---|
1. Verfasser: | |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!