Microelectromechanical disk resonators for direct detection of liquid-phase analytes

•Piezoelectric rotational-mode disk MEMS resonators are capable of direct real-time detection of biomolecular adsorption events in liquid media with very high sensitivities.•Molecular mass sensitivities as high as 65Hzcm2/ng are shown for such resonators when operating in liquid media.•∼2× differenc...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2014-09, Vol.216, p.136-141
Hauptverfasser:	Mehdizadeh, Emad, Chapin, Jennifer C., Gonzales, Jonathan M., Rahafrooz, Amir, Abdolvand, Reza, Purse, Byron W., Pourkamali, Siavash
Format:	Artikel
Sprache:	eng
Schlagworte:	Aqueous solutions Biomolecular sensor Deoxyribonucleic acid Disks DNA Frequency shift Label-free direct detection Liquid media Liquids Microelectromechanical systems Q factor Real time Resonators Rotational-mode disk MEMS resonator
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