Fluidic Sensor Realized in the LTCC Technology
This paper proposes a fully embedded LTCC (Low Temperature Co-fired Technology) fluidic sensor based on capacitive effect. The proposed capacitive fluidic sensor is built up by ten laser machined ceramic tape layers carrying holes and a micro-channel. The micro-channel is placed between capacitor el...
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| Veröffentlicht in: | Key engineering materials 2013-01, Vol.543, p.435-438 |
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| creator | Marić, Andrea Pochia, Mariana Mădălina Blaž, Nelu Radosavljević, Goran Rosca, Daniela |
| description | This paper proposes a fully embedded LTCC (Low Temperature Co-fired Technology) fluidic sensor based on capacitive effect. The proposed capacitive fluidic sensor is built up by ten laser machined ceramic tape layers carrying holes and a micro-channel. The micro-channel is placed between capacitor electrodes which are screen printed and embedded inside the substrate. The operating principle of this sensor is based on the measurement of capacitance variations evoked with different permittivity values of induced fluids. By inserting various fluids in the micro-channel, capacitance of the sensor changes according to different permittivity values. Detection of various fluids has been performed. Experimentally attained results are compared with electrical characteristics determined by analytical calculations and good agreement is achieved. |
| doi_str_mv | 10.4028/www.scientific.net/KEM.543.435 |
| format | Article |
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Experimentally attained results are compared with electrical characteristics determined by analytical calculations and good agreement is achieved.</description><subject>Dielectric constant</subject><subject>Fluid dynamics</subject><subject>Fluid flow</subject><subject>Fluidics</subject><subject>Fluids</subject><subject>Mathematical analysis</subject><subject>Permittivity</subject><subject>Sensors</subject><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqN0E9LwzAYx_EgCs7pe-hJvLR78qdJcxFlOBUngs5zyLLUZXTpTFrGfPVGJ3jd6XkOP76HD0KXGAoGpBptt9siGmd952pnCm-70dPdc1EyWjBaHqEB5pzkUsjyOP2AaS4rwk_RWYwrAIorXA5QMWl6t3Ame7M-tiF7tbpxX3aROZ91S5tNZ-NxNrNm6dum_dido5NaN9Fe_N0hep_czcYP-fTl_nF8O80NFdDlotIYc6q1kFwSkHNirOSaCg1a6JoybI3UfD7HwKpaA6ULKSgw0AyEKQkdoqt9dxPaz97GTq1dNLZptLdtHxXmogLMGMYHTAmAJCUt0_R6PzWhjTHYWm2CW-uwUxjUj6lKpurfVCVTlUxVMlXsN3CzD3RB-9glFrVq--ATxaGJb5U4hcA</recordid><startdate>20130101</startdate><enddate>20130101</enddate><creator>Marić, Andrea</creator><creator>Pochia, Mariana Mădălina</creator><creator>Blaž, Nelu</creator><creator>Radosavljević, Goran</creator><creator>Rosca, Daniela</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20130101</creationdate><title>Fluidic Sensor Realized in the LTCC Technology</title><author>Marić, Andrea ; Pochia, Mariana Mădălina ; Blaž, Nelu ; Radosavljević, Goran ; Rosca, Daniela</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c370t-78a1163aa7969209b2ce96a37a0a7af341ec9a6bb1048fa033d973040a407c523</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Dielectric constant</topic><topic>Fluid dynamics</topic><topic>Fluid flow</topic><topic>Fluidics</topic><topic>Fluids</topic><topic>Mathematical analysis</topic><topic>Permittivity</topic><topic>Sensors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Marić, Andrea</creatorcontrib><creatorcontrib>Pochia, Mariana Mădălina</creatorcontrib><creatorcontrib>Blaž, Nelu</creatorcontrib><creatorcontrib>Radosavljević, Goran</creatorcontrib><creatorcontrib>Rosca, Daniela</creatorcontrib><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Key engineering materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Marić, Andrea</au><au>Pochia, Mariana Mădălina</au><au>Blaž, Nelu</au><au>Radosavljević, Goran</au><au>Rosca, Daniela</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fluidic Sensor Realized in the LTCC Technology</atitle><jtitle>Key engineering materials</jtitle><date>2013-01-01</date><risdate>2013</risdate><volume>543</volume><spage>435</spage><epage>438</epage><pages>435-438</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><abstract>This paper proposes a fully embedded LTCC (Low Temperature Co-fired Technology) fluidic sensor based on capacitive effect. 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| subjects | Dielectric constant Fluid dynamics Fluid flow Fluidics Fluids Mathematical analysis Permittivity Sensors |
| title | Fluidic Sensor Realized in the LTCC Technology |
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