A novel design of brush scrubbing in post-CMP cleaning

Concentric and eccentric brush scrubbing behaviors of the hard disk drive (HDD) substrates in post-chemical mechanical polishing (CMP) process have been investigated with kinetic brush–disk contact trajectory analysis and hydrodynamic fluid velocity simulation as well as experimental studies. The ad...

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Veröffentlicht in:	International journal of machine tools & manufacture 2014-10, Vol.85, p.30-35
Hauptverfasser:	Qi, Zuqiang, Lu, Wanjia, Lee, Weiming
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Brush scrubbing Brushes Computational fluid dynamics Disks Eccentrics Fluid flow Hydrodynamic force Hydrodynamics Post-CMP cleaning Scrubbing Trajectories
Online-Zugang:	Volltext
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