Molecular dynamics simulations of clusters and thin film growth in the context of plasma sputtering deposition

Carrying out molecular dynamics (MD) simulations is a relevant way to understand growth phenomena at the atomic scale. Initial conditions are defined for reproducing deposition conditions of plasma sputtering experiments. Two case studies are developed to highlight the implementation of MD simulatio...

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Veröffentlicht in:	Journal of physics. D, Applied physics Applied physics, 2014-06, Vol.47 (22), p.1-17
Hauptverfasser:	Xie, Lu, Brault, Pascal, Bauchire, Jean-Marc, Thomann, Anne-Lise, Bedra, Larbi
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic structure cluster growth Deposition Engineering Sciences Entropy Molecular dynamics Plasma (physics) plasma sputtering Plasmas Simulation Sputtering thin film growth Thin films
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container_end_page	17
container_issue	22
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container_title	Journal of physics. D, Applied physics
container_volume	47
creator	Xie, Lu Brault, Pascal Bauchire, Jean-Marc Thomann, Anne-Lise Bedra, Larbi
description	Carrying out molecular dynamics (MD) simulations is a relevant way to understand growth phenomena at the atomic scale. Initial conditions are defined for reproducing deposition conditions of plasma sputtering experiments. Two case studies are developed to highlight the implementation of MD simulations in the context of plasma sputtering deposition: ZrxCu1−x metallic glass and AlCoCrCuFeNi high entropy alloy thin films deposited onto silicon. Effects of depositing atom kinetic energies and atomic composition are studied in order to predict the evolution of morphologies and atomic structure of MD grown thin films. Experimental and simulated x-ray diffraction patterns are compared.
doi_str_mv	10.1088/0022-3727/47/22/224004
format	Article
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source	IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects	Atomic structure cluster growth Deposition Engineering Sciences Entropy Molecular dynamics Plasma (physics) plasma sputtering Plasmas Simulation Sputtering thin film growth Thin films
title	Molecular dynamics simulations of clusters and thin film growth in the context of plasma sputtering deposition
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