Out-of-plane MEMS-based mechanical airflow sensor co-integrated in SOI CMOS technology

•Monolithic integration of capacitive airflow sensor with CMOS on thin film SOI technology.•Ultra low power capacitive detection with C-f ring oscillator converter.•10% variation oscillating frequency under 120m/s parallel airflow stimulus.•Simulation/measurement chain of beam deflection under airfl...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2014-02, Vol.206, p.67-74
Hauptverfasser:	André, Nicolas, Rue, Bertrand, Scheen, Gilles, Flandre, Denis, Francis, Laurent A., Raskin, Jean-Pierre
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Airflow Capacitive flow sensor Circuits CMOS CMOS–MEMS Drying Finite element simulation Microfabrication Modeling Monolithic integration Oscillators Power consumption Sensors
Online-Zugang:	Volltext
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