Development of an Ultraprecise Piezoelectric Deformable Mirror for Adaptive X-Ray Optics

Ultraprecise piezoelectric deformable mirrors have been developed to construct adaptive X-ray focusing optics whose optical parameters can be varied while simultaneously performing wavefront correction. We designed and developed a deformable mirror that did not have high-spatial-frequency deformatio...

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Veröffentlicht in:	Key engineering materials 2012-11, Vol.523-524, p.50-53
Hauptverfasser:	Matsuyama, Satoshi, Kohmura, Yoshiki, Yabashi, Makina, Imai, Shota, Sano, Yasuhisa, Ishikawa, Tetsuya, Tamasaku, Kenji, Nakamori, Hiroki, Kimura, Takashi, Yamauchi, Kazuto
Format:	Artikel
Sprache:	eng
Schlagworte:	Deformable mirrors Deformation Diffraction Focusing Interferometers Piezoelectricity Simulation X-rays
Online-Zugang:	Volltext
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