Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device
In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS sc...
Gespeichert in:
Veröffentlicht in: | Key engineering materials 2013-07, Vol.562-565, p.1083-1087 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
container_end_page | 1087 |
---|---|
container_issue | |
container_start_page | 1083 |
container_title | Key engineering materials |
container_volume | 562-565 |
creator | Liu, Yao Bo Yuan, Guang Min Chang, Hong Long Yuan, Wei Zheng |
description | In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique. |
doi_str_mv | 10.4028/www.scientific.net/KEM.562-565.1083 |
format | Article |
fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1677999604</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1677999604</sourcerecordid><originalsourceid>FETCH-LOGICAL-c343t-7ab3ba8d3b2e2daa578f9105d3f60185b843cb17ee5e4d21a27a3a46c12c5583</originalsourceid><addsrcrecordid>eNqVkUtLAzEUhQdRsFb_wywFmWkek0yyLG19YIuCXbgLmfSOTWkzNUkt_femVHCri8u5Sc49hPtl2R1GZYWIGOz3-zIYCy7a1prSQRw8T2Yl46RgnJUYCXqW9TBPZ1lLdp56hGkhBeGX2VUIK4QoFpj1svfhdru2Rkfbubxr86kO4PNxl26TzsEsnf3cQW5dPoYIJlr3kccl5OOD0xtr8lft9Sa9-OP0bDJ7S74va-A6u2j1OsDNj_az-f1kPnospi8PT6PhtDC0orGodUMbLRa0IUAWWrNatBIjtqAtR1iwRlTUNLgGYFAtCNak1lRX3GBiGBO0n92eYre-S_8MUW1sMLBeawfdLijM61pKyVH1ByuRlEtW1ck6OlmN70Lw0KqttxvtDwojdSSgEgH1S0AlAioRUIlAKqaOBFLK5JQSvXYhLW-pVt3Ou7SOf-V8AzvPmTU</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1629369547</pqid></control><display><type>article</type><title>Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device</title><source>Scientific.net Journals</source><creator>Liu, Yao Bo ; Yuan, Guang Min ; Chang, Hong Long ; Yuan, Wei Zheng</creator><creatorcontrib>Liu, Yao Bo ; Yuan, Guang Min ; Chang, Hong Long ; Yuan, Wei Zheng</creatorcontrib><description>In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.562-565.1083</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><subject>Devices ; Doppler ; Doppler effect ; Dynamics ; Lasers ; Microelectromechanical systems ; Scanning ; Vibration</subject><ispartof>Key engineering materials, 2013-07, Vol.562-565, p.1083-1087</ispartof><rights>2013 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c343t-7ab3ba8d3b2e2daa578f9105d3f60185b843cb17ee5e4d21a27a3a46c12c5583</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/2477?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Liu, Yao Bo</creatorcontrib><creatorcontrib>Yuan, Guang Min</creatorcontrib><creatorcontrib>Chang, Hong Long</creatorcontrib><creatorcontrib>Yuan, Wei Zheng</creatorcontrib><title>Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device</title><title>Key engineering materials</title><description>In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.</description><subject>Devices</subject><subject>Doppler</subject><subject>Doppler effect</subject><subject>Dynamics</subject><subject>Lasers</subject><subject>Microelectromechanical systems</subject><subject>Scanning</subject><subject>Vibration</subject><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqVkUtLAzEUhQdRsFb_wywFmWkek0yyLG19YIuCXbgLmfSOTWkzNUkt_femVHCri8u5Sc49hPtl2R1GZYWIGOz3-zIYCy7a1prSQRw8T2Yl46RgnJUYCXqW9TBPZ1lLdp56hGkhBeGX2VUIK4QoFpj1svfhdru2Rkfbubxr86kO4PNxl26TzsEsnf3cQW5dPoYIJlr3kccl5OOD0xtr8lft9Sa9-OP0bDJ7S74va-A6u2j1OsDNj_az-f1kPnospi8PT6PhtDC0orGodUMbLRa0IUAWWrNatBIjtqAtR1iwRlTUNLgGYFAtCNak1lRX3GBiGBO0n92eYre-S_8MUW1sMLBeawfdLijM61pKyVH1ByuRlEtW1ck6OlmN70Lw0KqttxvtDwojdSSgEgH1S0AlAioRUIlAKqaOBFLK5JQSvXYhLW-pVt3Ou7SOf-V8AzvPmTU</recordid><startdate>20130701</startdate><enddate>20130701</enddate><creator>Liu, Yao Bo</creator><creator>Yuan, Guang Min</creator><creator>Chang, Hong Long</creator><creator>Yuan, Wei Zheng</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7TB</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>FR3</scope><scope>H8D</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20130701</creationdate><title>Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device</title><author>Liu, Yao Bo ; Yuan, Guang Min ; Chang, Hong Long ; Yuan, Wei Zheng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c343t-7ab3ba8d3b2e2daa578f9105d3f60185b843cb17ee5e4d21a27a3a46c12c5583</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Devices</topic><topic>Doppler</topic><topic>Doppler effect</topic><topic>Dynamics</topic><topic>Lasers</topic><topic>Microelectromechanical systems</topic><topic>Scanning</topic><topic>Vibration</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Liu, Yao Bo</creatorcontrib><creatorcontrib>Yuan, Guang Min</creatorcontrib><creatorcontrib>Chang, Hong Long</creatorcontrib><creatorcontrib>Yuan, Wei Zheng</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Aerospace Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Key engineering materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Liu, Yao Bo</au><au>Yuan, Guang Min</au><au>Chang, Hong Long</au><au>Yuan, Wei Zheng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device</atitle><jtitle>Key engineering materials</jtitle><date>2013-07-01</date><risdate>2013</risdate><volume>562-565</volume><spage>1083</spage><epage>1087</epage><pages>1083-1087</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><abstract>In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.</abstract><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/KEM.562-565.1083</doi><tpages>5</tpages></addata></record> |
fulltext | fulltext |
identifier | ISSN: 1013-9826 |
ispartof | Key engineering materials, 2013-07, Vol.562-565, p.1083-1087 |
issn | 1013-9826 1662-9795 1662-9795 |
language | eng |
recordid | cdi_proquest_miscellaneous_1677999604 |
source | Scientific.net Journals |
subjects | Devices Doppler Doppler effect Dynamics Lasers Microelectromechanical systems Scanning Vibration |
title | Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device |
url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T18%3A44%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Application%20of%20Laser%20Doppler%20Technique%20in%20Detecting%20the%20Dynamic%20Parameter%20of%20MEMS%20Device&rft.jtitle=Key%20engineering%20materials&rft.au=Liu,%20Yao%20Bo&rft.date=2013-07-01&rft.volume=562-565&rft.spage=1083&rft.epage=1087&rft.pages=1083-1087&rft.issn=1013-9826&rft.eissn=1662-9795&rft_id=info:doi/10.4028/www.scientific.net/KEM.562-565.1083&rft_dat=%3Cproquest_cross%3E1677999604%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1629369547&rft_id=info:pmid/&rfr_iscdi=true |