Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device

In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS sc...

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Veröffentlicht in:Key engineering materials 2013-07, Vol.562-565, p.1083-1087
Hauptverfasser: Liu, Yao Bo, Yuan, Guang Min, Chang, Hong Long, Yuan, Wei Zheng
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Yuan, Guang Min
Chang, Hong Long
Yuan, Wei Zheng
description In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.
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subjects Devices
Doppler
Doppler effect
Dynamics
Lasers
Microelectromechanical systems
Scanning
Vibration
title Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device
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