Application of Laser Doppler Technique in Detecting the Dynamic Parameter of MEMS Device

In order to test the dynamic performance of MEMS devices accurately, the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror. The measuring formulas of the object motion velocity and displacement were derived. A kind of MEMS scanning mirror was tested using the established optical testing system. The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis. The method has significant reference value to the application of the laser Doppler technique.