Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler

The development of a high-speed nanoprofiler is essential for developing the next generation of ultraprecision aspheric mirrors. The purpose of this study is to develop a new high-speed nanoprofiler that traces the normal vector of an aspheric mirror surface. The method of measurement adopted here i...

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Veröffentlicht in:	Key engineering materials 2012-11, Vol.523-524, p.842-846
Hauptverfasser:	Usuki, Koji, Tonaru, Daisuke, Uchikoshi, Junichi, Higashi, Yasuo, Endo, Katsuyosi, Kitayama, Takao, Kojima, Takuya, Matsumura, Hiroki
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Coders Encoders High speed Mathematical analysis Nanostructure Vectors (mathematics)
Online-Zugang:	Volltext
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