Effects of residual stress and interface dislocations on the ionic conductivity of yttria stabilized zirconia nano-films

The effects of residual stress and interface dislocations on the ionic conductivity of yttria stabilized zirconia (YSZ) polycrystalline nano-films deposited onto quartz substrate via pulsed-DC magnetron sputtering are systematically studied. The residual stress of YSZ film is evaluated by a cos2αsin...

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Veröffentlicht in:	Thin solid films 2015-01, Vol.574, p.66-70
Hauptverfasser:	Yeh, Tsung-Her, Lin, Ruei-De, Cherng, Jyh-Shiarn
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Deposition Dislocation Dislocations Film thickness Ionic conductivity Nano-films Nanostructure Residual stress Yttria stabilized zirconia
Online-Zugang:	Volltext
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