The Simulated Calculation of Electric Impedance Sensor

In this paper, the electric impendence sensor is simulated calculation with COMSOL Multiphysics. The relationship between impedance and x-displacement of air cavity, the relationship between impedance and y-displacement of air cavity, and the relationships between impedance and radius of air cavity...

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Veröffentlicht in:Applied Mechanics and Materials 2015-03, Vol.738-739 (Sensors, Measurement, Intelligent Materials and Technologies III), p.7-10
Hauptverfasser: Lv, Jun, Li, Qiang, Yang, Yong Ming, Yuan, Zuo Bin
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creator Lv, Jun
Li, Qiang
Yang, Yong Ming
Yuan, Zuo Bin
description In this paper, the electric impendence sensor is simulated calculation with COMSOL Multiphysics. The relationship between impedance and x-displacement of air cavity, the relationship between impedance and y-displacement of air cavity, and the relationships between impedance and radius of air cavity are obtained.
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subjects Holes
Impedance
Mathematical analysis
Sensors
Simulation
title The Simulated Calculation of Electric Impedance Sensor
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