A novel triple-actuating mechanism of an active air mount for vibration control of precision manufacturing machines: experimental work
With the goal of vibration control and isolation in a clean room, we propose a new type of air mount which consists of pneumatic, electromagnetic (EM), and magnetorheological (MR) actuators. The air mount is installed below a semiconductor manufacturing machine to reduce the adverse effects caused b...
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Veröffentlicht in: | Smart materials and structures 2014-07, Vol.23 (7), p.1-8 |
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Format: | Artikel |
Sprache: | eng |
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