High-Performance Hybrid Complementary Logic Inverter through Monolithic Integration of a MEMS Switch and an Oxide TFT

A hybrid complementary logic inverter consisting of a microelectromechanical system switch as a promising alternative for the p‐type oxide thin film transistor (TFT) and an n‐type oxide TFT is presented for ultralow power integrated circuits. These heterogeneous microdevices are monolithically integrated. The resulting logic device shows a distinctive voltage transfer characteristic curve, very low static leakage, zero‐short circuit current, and exceedingly high voltage gain.