Electrostatic and mechanical characterization of 3-D micro-wineglass resonators

•Two interchangeable modes of excitation are demonstrated for testing of 3D micro-wineglass resonators.•Mechanical testing consists of pinging using a piezo actuated probe assembly and optical pickoff via laser Doppler vibrometry.•Electrostatic transduction is provided by assembled electrode structu...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2014-08, Vol.215, p.150-154
Hauptverfasser:	Senkal, D., Ahamed, M.J., Trusov, A.A., Shkel, A.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	3-D MEMS Actuators Adjustable electrodes Assembly Doppler effect Electrodes Electrostatics Excitation MEMS ratchet mechanism Micro-glassblowing Resonators Three dimensional Wineglass resonator
Online-Zugang:	Volltext
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