Interfacial characteristics of polyethylene terephthalate-based piezoelectric multi-layer films

The study examines the deformation between interfaces and the adhesion mechanism of multi-layer flexible electronic composites. Indium tin oxide (ITO), aluminum (Al), and zinc oxide (ZnO) were deposited on a polyethylene terephthalate (PET) substrate using radio frequency magnetron sputtering at roo...

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Veröffentlicht in:	Thin solid films 2013-03, Vol.531, p.284-293
Hauptverfasser:	Liu, Z.H., Pan, C.T., Chen, Y.C., Liang, P.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Indium tin oxide Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Multilayer Multilayers Nano-indentation Nanostructure Physical properties of thin films, nonelectronic Physics Piezoelectricity Polyethylene terephthalate Polyethylene terephthalates Scratch test Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Zinc oxide
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