Theory of Attenuated Total Reflection Including Effects of Roughness

We have developed a theory of attenuated total reflection applicable to multi-layered samples with roughness at surfaces and/or interfaces. Angle dependence of reflectivity for incident light with any polarization are expressed by a power series of profile functions of roughness, and the terms up to...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2013-10, Vol.52 (10), p.102001-102001-7
1. Verfasser:	Uehara, Yoichi
Format:	Artikel
Sprache:	eng
Schlagworte:	Attenuation Deltas Mathematical analysis Mathematical models Polynomials Reflection Reflectivity Roughness
Online-Zugang:	Volltext
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