Highly transparent and conductive Al-doped ZnO films synthesized by pulsed laser co-ablation of Zn and Al targets assisted by oxygen plasma

•AZO thin films were synthesized by co-ablation of a Zn target and an Al target.•Zn ablation results in the reactive deposition of ZnO film assisted by oxygen plasma.•Al ablation provides Al dopants to be in-situ doped in the growing ZnO film.•AZO thin films show high optical transparency from ultra...

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Veröffentlicht in:	Journal of alloys and compounds 2015-03, Vol.626, p.415-420
Hauptverfasser:	You, Qinghu, Cai, Hua, Gao, Kun, Hu, Zhigao, Guo, Shuang, Liang, Peipei, Sun, Jian, Xu, Ning, Wu, Jiada
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Al-doped ZnO Aluminum Annealing Azo Carrier density Co-ablation deposition Deposition Doping Electrical properties In-situ doping Optical properties Thin films Zinc Zinc oxide
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