Design and Analysis of a Novel Micro-Angular Vibration Testbed Driven by Voice Coil Actuator

The construction and the operating principle of the novel micro-angular vibration testbed (MAVT) are presented, the MAVT is designed to complete the angular performance testing for the micro sensor and parts such as MEMS-gyro, angular accelerometer. A systemic design procedure of the optimized flexu...

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Veröffentlicht in:Key engineering materials 2012-08, Vol.522, p.587-592
Hauptverfasser: Zhang, Zhi Yong, Zhou, Qing Kun
Format: Artikel
Sprache:eng
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