Design and Analysis of a Novel Micro-Angular Vibration Testbed Driven by Voice Coil Actuator
The construction and the operating principle of the novel micro-angular vibration testbed (MAVT) are presented, the MAVT is designed to complete the angular performance testing for the micro sensor and parts such as MEMS-gyro, angular accelerometer. A systemic design procedure of the optimized flexu...
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Veröffentlicht in: | Key engineering materials 2012-08, Vol.522, p.587-592 |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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