Frequency-based magnetic field sensing using Lorentz force axial strain modulation in a double-ended tuning fork

This paper presents a frequency-based silicon micromechanical resonant magnetic field sensor with a high quality factor by using a double-ended tuning fork (DETF). The sensing mechanism is based on the detection of resonant frequency shift of the DETF resonator due to the exertion of a Lorentz force...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Sensors and actuators. A. Physical. 2014-05, Vol.211, p.145-152
Hauptverfasser:	Zhang, Weiguan, Lee, Joshua E.-Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Devices Finite element method Magnetic field sensors Magnetic fields Mathematical analysis Mathematical models MEMS Quality factor Resonant microsensors Resonator Resonators Sensors Tuning
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!