Detecting Method of Bulk Defects in DLC Films Using Light Scattering

Diamond-like carbon (DLC) film has various micro-size defects like pinhole, void and particle. When DLC film is exposed to white light, light is scattered in all direction at defects in DLC film. In this paper, defects in DLC film are detected by observing scattering light from defects under dark-fi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Matsuo, Makoto, Ohtake, Naoto, Sakurada, Yuichi, Iwamoto, Yoshinao, Yasuhara, Toshiyuki, Takashima, Mai
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Defects Diamond-like carbon films Filtering Scattering Surface defects Transmittance Wavelengths White light
Online-Zugang:	Volltext
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