Development of a heat-generable mold insert and its application to the injection molding of microstructures

[Display omitted] •A micro-heater-embedding mold insert for micro injection molding is proposed.•Silicon-based micro heater exhibits stable properties and heating performance.•We reduce the de-molding force and destruction by using dynamic partial heating. This work presents a heat-generable mold in...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Microelectronic engineering 2014-04, Vol.117, p.41-47
Hauptverfasser:	Liou, A.C., Chen, R.H., Huang, C.K., Su, C.H., Tsai, P.Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Doping Electric power generation Electronics Energy Energy. Thermal use of fuels Exact sciences and technology Heating Heating, air conditioning and ventilation Holes Injection molding Inserts Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Material and general technologies Materials science Micro-heater Micro-structures Microelectronic fabrication (materials and surfaces technology) Mold insert Molds Phase diagrams and microstructures developed by solidification and solid-solid phase transformations Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silicon Solidification Space heating. Hot water Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Walls
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!