Current status of the NSLS-II optical metrology laboratory

During the last decade, we have seen an ultra-fast progress in X-ray optics performances. This enhancement is directly linked to the development of the necessary tools to control these optical components. These metrology tools are necessary for the fabrication (to guide some polishing deterministic...

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Veröffentlicht in:	Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2013-05, Vol.710, p.17-23
Hauptverfasser:	Idir, Mourad, Kaznatcheev, Konstantine, Qian, Shinan, Conley, Ray
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerators Detectors Metrology Optical components Optical metrology Particle physics Polishing Spectrometers X-ray optics synchrotron radiation beamline X-rays
Online-Zugang:	Volltext
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