Integrated design of the feedback controller and topography estimator for atomic force microscopy

In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of...

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Veröffentlicht in:	Control engineering practice 2013-08, Vol.21 (8), p.1110-1120
Hauptverfasser:	Kuiper, S., Van den Hof, P.M.J., Schitter, G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Control systems Control theory Design engineering Dynamical systems Dynamics Estimators Model-based control Optimal filter design Robust control Topography Topography estimation
Online-Zugang:	Volltext
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